On September 10, the 8-inch R & D pilot line of "Beyond Moore", which was constructed by Shanghai Institute of Micro-technology Industry, was officially launched to fill the gap of lacking small-batch intermediate test production lines in the field of intelligent sensors for MEMS in our country and striving to realize our chip Industry controllable. Micro-electromechanical system smart sensor, is a new type of sensor with the advantages of small size, low cost, integration and intelligence. In smartphones, wearable devices, consumer drone and other consumer electronics products, micro-electro-mechanical system smart sensor with a very high "appearance rate", almost every smart phone has at least one micro-electro-mechanical system smart sensor microphone, high-end There are even three smartphones. The sensor is located at the base of the entire Internet of Things and is the entrance to data acquisition and the cornerstone of the Internet of Things. According to "2016-2017 China Internet of Things Development Annual Report" shows that at present, about 60% of China's sensors rely on imports, and MEMS sensors rely almost entirely on imports. Academician Wang Xi, vice chairman of China Association for Science and Technology and founder of Shanghai Research Institute of Micro Technology Industry, believes that it is imperative to set up an independent 8-inch research and development to get rid of the serious dependence of MEMS sensors on imports and to realize the autonomous control of China's chip industry. Pilot line. You Jiajie, director of 8-inch R & D pilot line, said that the scientific research capability of MEMS in China is not weak, and the leading product has not been developed because of the interruption of the pilot program. "R & D units prototype devices can not be immediately put into production lines, the pilot must be small batch, the prototype device can be optimized for mass production process or product. Previously, there is no such pilot line in the country, due to the amount of test Limited, large foundries will not pick up such a small single, many of the scientific achievements have stopped at the prototype device. Youjiajie said that the newly-built R & D pilot line currently provides a production capacity of about 3,000 wafers per month, and the latter will reach 5,000. "We can support the capacity needs of users from a few hundred to a few thousand. Small orders are first hatched on the pilot line. Once the pre-market test is successful, large-volume orders can be transferred to large foundries to start mass production " According to reports, the R & D pilot line has a high level of micro-nano processing super-clean plant, the field of sensor chips can be fully carried out in the field of new technology, new devices, new system development and small batch production. At present, the R & D pilot line is mainly focused on the research and development of micro-electromechanical system smart sensors and will be expanded to innovate the new non-digital and diversified semiconductor product technology beyond "Moore" in the future. Steel material machining parts
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