[ China Instrument Network Instrument Research and Development ] The key project of “Major Scientific Instruments and Equipment Development” of the Ministry of Science and Technology was launched in 2018. The Shanghai Institute of Metrology and Measurement Technology as an important subject undertakes to actively participate in the declaration of two major scientific instrument development projects. It is the development and application of "micro- and nano-structure dynamic characteristics tester" and "development and application of high-precision three-dimensional thread comprehensive measuring instrument".

The project “Development and Application of Micro-Nanostructure Dynamic Characteristics Tester” mainly focuses on the requirements of micro-nano structure and micro-electro-mechanical system (MEMS) device dynamic characteristics testing, and breaks through key technologies such as air-conditioning and auto-focusing with high signal-to-noise ratio. The micro- and nano-structure dynamic characteristics tester with independent intellectual property rights, stable and reliable quality, and localization of core components, development of related software and databases, and the measurement and analysis of characteristic frequencies and modes of micro- and nano-structures and MEMS devices, as well as typical defect identification. Shanghai Institute of Metrology and Testing Technology undertakes the project of "Research on the Performance Evaluation Method of Micro-Nanostructure Dynamic Characteristics Tester" in this project. It will focus on the research of micro-nano structure standard vibration modal excitation method, build a calibration system platform, and implement a laser measurement system. Accurate evaluation of key parameters, and carry out test validation and evaluation of the uncertainty of key parameters.
The “Development and Application of High Accuracy 3D Thread Synthetic Measuring Instrument” focuses on the comprehensive testing requirements of thread geometry parameters in advanced manufacturing fields, breaking through the high-precision three-dimensional scanning probes of inner and outer threads and the key technology of high-efficiency reconstruction of 3D parameters, and developing autonomous knowledge High-precision three-dimensional thread comprehensive measuring instrument with stable and reliable property rights, reliable quality, and localization of core components, development of related software and databases, realizing three-dimensional automatic scanning detection of full thread parameters. Shanghai Institute of Metrology and Testing Technology undertakes the project of “Application and Development of High-Precision Three-Dimensional Thread Synthetic Measuring Instruments in the Field of Ordinary Threads” of this project. It will focus on exploring and testing the application of instruments in the field of ordinary threads, and establishing instruments for ordinary applications. Application program in the field of threading, writing a digital thread database, etc.
Scientific instruments and equipment are the cornerstone of scientific research and technological innovation and are an important guarantee for economic and social development and national defense security. Our hospital relied on the successful experience of the “Study and Application of Cross-scale Micro/Nanometers” for the development of major scientific instruments in 2014, and actively organized scientific research teams to undertake important tasks, in order to enhance the independent innovation capability of scientific instruments and equipment in China, and promote industrial upgrading and development. , Support innovation and drive the development strategy to make a positive contribution.
(Original title: Our institute actively participated in two key special projects for the development of "major scientific equipment and equipment."

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