Recently, Japan's Institute of Industrial Technology Research Group and Japan's CHINO Co., Ltd. has successfully developed a high temperature in the vicinity of 1000 degrees Celsius, accurate temperature measurement platinum resistance thermometer. In the past, platinum and platinum (platinum) wire sensors were used as platinum resistance thermometers for the accurate temperature measurement in semiconductor manufacturing. However, at high temperatures in the vicinity of 1000 ° C, the resistivity of platinum is not stable, and the platinum wire itself also generates heat distortion, so that it is difficult to achieve high-precision measurement. In order to develop a temperature sensor that can also have a stable resistivity at a high temperature of 1000 degrees Celsius, the research team analyzed the platinum resistance thermometer on the market, conducted appropriate heat treatment on the sensor, and then used Japan's national standard water triple point Device and silver solidification point device repeated thermal cycling test, analysis of resistance changes at different temperatures. The results showed that after heat treatment, platinum temperature sensor in the vicinity of 1000 degrees Celsius to minimize the change in resistance, thermometer performance more stable. In addition, by adjusting the structure of the platinum wire, so that the degree of thermal distortion is reduced. It is reported that the newly developed thermometer silver coagulation point 961.78 degrees Celsius, the measurement range of ± 0.001 degrees (0.01 degrees before); water three-phase point of 0.01 degrees Celsius, the measured value changes are stable within ± 0.0005 degrees to reach the world The highest level. Wuxi Wushi Machinery Factory , https://www.cnrollmill.com